Laser ablation at 355 nm of a specially designed polymer was used as a true single step dry-etching process to create a two-beam interference grating. Gratings with groove spacings of 180 and 1090 nm were created with single laser pulses. Moreover, by varying the laser fluence and/or the angle between the two beams, variable modulation frequencies (depth/spacing) could be obtained. Additional pulses deteriorated the grating quality, demonstrating the importance of the single pulse approach.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 1999 Aug 16|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)