Abstract
Laser ablation at 355 nm of a specially designed polymer was used as a true single step dry-etching process to create a two-beam interference grating. Gratings with groove spacings of 180 and 1090 nm were created with single laser pulses. Moreover, by varying the laser fluence and/or the angle between the two beams, variable modulation frequencies (depth/spacing) could be obtained. Additional pulses deteriorated the grating quality, demonstrating the importance of the single pulse approach.
Original language | English |
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Pages (from-to) | 1018-1020 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 75 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1999 Aug 16 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)