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Smoothing sidewalls of a MEMS-based silicon X-ray optics
Teppei Moriyama, Yuichiro Ezoe, Tomohiro Ogawa, Takaya Ohashi, Ikuyuki Mitsuishi, Makoto Mita, Kazuhisa Mitsuda, Yoshiaki Kanamori, Akio Maeda
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)