Soft magnetic Co-(TiN) composite films realized within a wide-range of cobalt content

Yiwen Zhang; Shigehiro Ohnuma; Hiroshi Masumoto

doi:10.1109/TMAG.2011.2156763

Soft magnetic Co-(TiN) composite films realized within a wide-range of cobalt content

Yiwen Zhang, Shigehiro Ohnuma, Hiroshi Masumoto

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Co_x-(TiN) _1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Co_x-(TiN)_1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 ° C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.

Original language	English
Article number	6028270
Pages (from-to)	3795-3798
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	47
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2011.2156763
Publication status	Published - 2011 Oct

Keywords

Co-based films
TiN matrix
gigahertz frequency
high permeability
soft magnetic materials
thermal stability

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TMAG.2011.2156763

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title = "Soft magnetic Co-(TiN) composite films realized within a wide-range of cobalt content",

abstract = "The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN) 1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 ° C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.",

keywords = "Co-based films, TiN matrix, gigahertz frequency, high permeability, soft magnetic materials, thermal stability",

author = "Yiwen Zhang and Shigehiro Ohnuma and Hiroshi Masumoto",

note = "Funding Information: This work was supported by Grant-in-Aid for Research Activity Start-up, JSPS (22860007). A part of this research was a cooperative program of the Advanced Research Center of Metallic Glasses, Institute for Materials Research, Tohoku University. The authors would like to thank Mr. T. Iwasa of DEN-JIKEN for magnetic property measurements.",

year = "2011",

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doi = "10.1109/TMAG.2011.2156763",

language = "English",

volume = "47",

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AU - Zhang, Yiwen

AU - Ohnuma, Shigehiro

AU - Masumoto, Hiroshi

N1 - Funding Information: This work was supported by Grant-in-Aid for Research Activity Start-up, JSPS (22860007). A part of this research was a cooperative program of the Advanced Research Center of Metallic Glasses, Institute for Materials Research, Tohoku University. The authors would like to thank Mr. T. Iwasa of DEN-JIKEN for magnetic property measurements.

PY - 2011/10

Y1 - 2011/10

N2 - The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN) 1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 ° C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.

AB - The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN) 1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 ° C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.

KW - Co-based films

KW - TiN matrix

KW - gigahertz frequency

KW - high permeability

KW - soft magnetic materials

KW - thermal stability

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Soft magnetic Co-(TiN) composite films realized within a wide-range of cobalt content

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Keywords

ASJC Scopus subject areas

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