Abstract
Dexterity and softness of micromanipulators are important issues in assembly of fragile complex microstructures. This paper presents micromanipulator devices with 3 and 6 degrees of freedom intended for soft dextrous motion. The 3-DOF device moved 2 mm at the maximum with a response of 13 Hz. Experiments of microscopic teleoperation proved that the device was suitable for dynamic micromotion. The 6-DOF device could control 3 translation and 3 rotation independently. The practical frequency range was up to 3 Hz, the maximum displacement was 0.4 mm, and the maximum rotation angle was 2 deg.
Original language | English |
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Pages | 37-42 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 1999 Jan 1 |
Externally published | Yes |
Event | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 1999 Jan 17 → 1999 Jan 21 |
Other
Other | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS |
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City | Orlando, FL, USA |
Period | 99/1/17 → 99/1/21 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering