TY - JOUR
T1 - Soft x-ray analysis system for reflection, secondary electron, and fluorescence spectroscopy
AU - Hirai, Y.
AU - Waki, I.
AU - Momose, A.
AU - Hayakawa, K.
N1 - Copyright:
Copyright 2007 Elsevier B.V., All rights reserved.
PY - 1989
Y1 - 1989
N2 - This article describes an UHV compatable soft x-ray analysis system for reflection, secondary electron, and fluorescence spectroscopy. It is equipped with a reflectometer with an angular accuracy of 0.01°. This is achieved with rotary encoders directly coupled to the rotation axes. At the same time, the system is equipped with an electron multiplier, a cylindrical mirror analyzer, and a Si(Li) detector, each for measuring total secondary electrons, photo- and Auger electrons, and fluorescence. Furthermore, it is possible to form multilayer films and analyze them in situ. The performance of the reflectometer has been tested on the beamline BL-8A at the Photon Factory. We present the results of reflectivity measurements for diamond-cut copper mirrors and Langmuir-Blodgett films.
AB - This article describes an UHV compatable soft x-ray analysis system for reflection, secondary electron, and fluorescence spectroscopy. It is equipped with a reflectometer with an angular accuracy of 0.01°. This is achieved with rotary encoders directly coupled to the rotation axes. At the same time, the system is equipped with an electron multiplier, a cylindrical mirror analyzer, and a Si(Li) detector, each for measuring total secondary electrons, photo- and Auger electrons, and fluorescence. Furthermore, it is possible to form multilayer films and analyze them in situ. The performance of the reflectometer has been tested on the beamline BL-8A at the Photon Factory. We present the results of reflectivity measurements for diamond-cut copper mirrors and Langmuir-Blodgett films.
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U2 - 10.1063/1.1140774
DO - 10.1063/1.1140774
M3 - Article
AN - SCOPUS:0038811057
SN - 0034-6748
VL - 60
SP - 2219
EP - 2222
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 7
ER -