TY - JOUR
T1 - Sol–gel deposition and characterization of lead zirconate titanate thin film using different commercial sols
AU - Moriyama, Masaaki
AU - Totsu, Kentaro
AU - Tanaka, Shuji
N1 - Funding Information:
This study was partly supported by the Nanotechnology Platform (MEXT) and JSPS KAKENHI Grant Number 18H01390. The authors would like to thank Ms. Natsumi Makimoto and Dr. Ken Kobayashi of the National Institute of Advanced Industrial Science and Technology (AIST) for their help in the measurement of piezoelectric constants.
Publisher Copyright:
© MYU K.K.
PY - 2019
Y1 - 2019
N2 - The sol–gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, and users are interested in which sol best fits their application and deposition tool. In this study, PZT thin films were deposited using different commercial sols, and their characteristics were evaluated and compared in terms of film thickness, crystal orientation, and ferroelectric property. We found that a rapid thermal annealing (RTA) temperature of 650 ℃ and a drying temperature of 180 ℃ were suitable as starting conditions regardless of the PZT sol. Under these conditions, the piezoelectric constant d31 is more than 75 pm/V. Optimization can be carried out efficiently by each user under these conditions.
AB - The sol–gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, and users are interested in which sol best fits their application and deposition tool. In this study, PZT thin films were deposited using different commercial sols, and their characteristics were evaluated and compared in terms of film thickness, crystal orientation, and ferroelectric property. We found that a rapid thermal annealing (RTA) temperature of 650 ℃ and a drying temperature of 180 ℃ were suitable as starting conditions regardless of the PZT sol. Under these conditions, the piezoelectric constant d31 is more than 75 pm/V. Optimization can be carried out efficiently by each user under these conditions.
KW - Ferroelectric property
KW - Lead zirconate titanate (PZT)
KW - Piezoelectric constant
KW - Rapid thermal annealing (RTA)
KW - Sol–gel method
KW - X-ray diffraction (XRD)
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U2 - 10.18494/SAM.2019.2420
DO - 10.18494/SAM.2019.2420
M3 - Article
AN - SCOPUS:85071321859
SN - 0914-4935
VL - 31
SP - 2497
EP - 2509
JO - Sensors and Materials
JF - Sensors and Materials
IS - 8
ER -