Solidly mounted ladder filter using shear horizontal wave in LiNbO3

Michio Kadota; Shuji Tanaka

doi:10.1109/ULTSYM.2016.7728577

Solidly mounted ladder filter using shear horizontal wave in LiNbO₃

Michio Kadota, Shuji Tanaka

ENG - Robotics

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

17 Citations (Scopus)

Abstract

The 0-th shear horizontal (SH₀) mode plate wave has an electromechanical coupling factor k² larger than 50% in a (0°, 120°, 0°) LiNbO₃ (LN) plate thinner than 0.1λ, where λ is a pitch of an intergidital transducer (IDT). In the previous study, ultra-wide-band ladder filters composed of cavity type resonators recorded 6 dB bandwidth from 41% to 51% in a digital TV band. However, the structure is fragile, because the LN plate as thin as 0.5-0.6 μm is self-suspended. Inspired by solidly mounted (SM) type film bulk acoustic resonators (FBAR), the authors have come up with SM type SH wave devices. The SM type SH wave resonator has an ultra-wide bandwidth of 20% similar to that of SH0 plate wave resonators. In this study, the SM type ladder filter with an insertion loss of 0.5 dB was developed.

Original language	English
Title of host publication	2016 IEEE International Ultrasonics Symposium, IUS 2016
Publisher	IEEE Computer Society
ISBN (Electronic)	9781467398978
DOIs	https://doi.org/10.1109/ULTSYM.2016.7728577
Publication status	Published - 2016 Nov 1
Event	2016 IEEE International Ultrasonics Symposium, IUS 2016 - Tours, France Duration: 2016 Sept 18 → 2016 Sept 21

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2016-November
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2016 IEEE International Ultrasonics Symposium, IUS 2016
Country/Territory	France
City	Tours
Period	16/9/18 → 16/9/21

Keywords

ladder filter
low insertion loss
multi-layer reflector
shear horizontal wave
solidly mounted type
wide band

Access to Document

10.1109/ULTSYM.2016.7728577

Cite this

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title = "Solidly mounted ladder filter using shear horizontal wave in LiNbO3",

abstract = "The 0-th shear horizontal (SH0) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbO3 (LN) plate thinner than 0.1λ, where λ is a pitch of an intergidital transducer (IDT). In the previous study, ultra-wide-band ladder filters composed of cavity type resonators recorded 6 dB bandwidth from 41% to 51% in a digital TV band. However, the structure is fragile, because the LN plate as thin as 0.5-0.6 μm is self-suspended. Inspired by solidly mounted (SM) type film bulk acoustic resonators (FBAR), the authors have come up with SM type SH wave devices. The SM type SH wave resonator has an ultra-wide bandwidth of 20% similar to that of SH0 plate wave resonators. In this study, the SM type ladder filter with an insertion loss of 0.5 dB was developed.",

keywords = "ladder filter, low insertion loss, multi-layer reflector, shear horizontal wave, solidly mounted type, wide band",

author = "Michio Kadota and Shuji Tanaka",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 2016 IEEE International Ultrasonics Symposium, IUS 2016 ; Conference date: 18-09-2016 Through 21-09-2016",

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Kadota, M & Tanaka, S 2016, Solidly mounted ladder filter using shear horizontal wave in LiNbO₃. in 2016 IEEE International Ultrasonics Symposium, IUS 2016., 7728577, IEEE International Ultrasonics Symposium, IUS, vol. 2016-November, IEEE Computer Society, 2016 IEEE International Ultrasonics Symposium, IUS 2016, Tours, France, 16/9/18. https://doi.org/10.1109/ULTSYM.2016.7728577

TY - GEN

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AU - Kadota, Michio

AU - Tanaka, Shuji

PY - 2016/11/1

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N2 - The 0-th shear horizontal (SH0) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbO3 (LN) plate thinner than 0.1λ, where λ is a pitch of an intergidital transducer (IDT). In the previous study, ultra-wide-band ladder filters composed of cavity type resonators recorded 6 dB bandwidth from 41% to 51% in a digital TV band. However, the structure is fragile, because the LN plate as thin as 0.5-0.6 μm is self-suspended. Inspired by solidly mounted (SM) type film bulk acoustic resonators (FBAR), the authors have come up with SM type SH wave devices. The SM type SH wave resonator has an ultra-wide bandwidth of 20% similar to that of SH0 plate wave resonators. In this study, the SM type ladder filter with an insertion loss of 0.5 dB was developed.

AB - The 0-th shear horizontal (SH0) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbO3 (LN) plate thinner than 0.1λ, where λ is a pitch of an intergidital transducer (IDT). In the previous study, ultra-wide-band ladder filters composed of cavity type resonators recorded 6 dB bandwidth from 41% to 51% in a digital TV band. However, the structure is fragile, because the LN plate as thin as 0.5-0.6 μm is self-suspended. Inspired by solidly mounted (SM) type film bulk acoustic resonators (FBAR), the authors have come up with SM type SH wave devices. The SM type SH wave resonator has an ultra-wide bandwidth of 20% similar to that of SH0 plate wave resonators. In this study, the SM type ladder filter with an insertion loss of 0.5 dB was developed.

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KW - low insertion loss

KW - multi-layer reflector

KW - shear horizontal wave

KW - solidly mounted type

KW - wide band

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