TY - GEN
T1 - Solubility of oxygen, nitrogen and carbon in liquid silicon
AU - Iguchi, Yasutaka
AU - Narushima, Takayuki
PY - 1993
Y1 - 1993
N2 - The solubilities of oxygen, nitrogen and carbon in liquid silicon equilibrated with SiO2, Si3N4 and SiC, respectively, were determined in the temperature range of 1693 to 1873K. The solubility values extrapolated to the melting point of silicon were 40ppm (O), 4ppm(N) and 123ppm(C). The standard free energy changes for solution of these elements in liquid silicon were evaluated.
AB - The solubilities of oxygen, nitrogen and carbon in liquid silicon equilibrated with SiO2, Si3N4 and SiC, respectively, were determined in the temperature range of 1693 to 1873K. The solubility values extrapolated to the melting point of silicon were 40ppm (O), 4ppm(N) and 123ppm(C). The standard free energy changes for solution of these elements in liquid silicon were evaluated.
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M3 - Conference contribution
AN - SCOPUS:0027850251
SN - 0873392566
T3 - First International Conference on Processing Materials for Properties
SP - 437
EP - 440
BT - First International Conference on Processing Materials for Properties
PB - Publ by Minerals, Metals & Materials Soc (TMS)
T2 - Proceedings of the 1st International Conference on Processing Materials for Properties
Y2 - 7 November 1993 through 10 November 1993
ER -