Abstract
The growth and structure of Ti films evaporated on ultra-high-vacuum- and air-cleaved NaCl substrates at room temperature have been studied by reflection high-energy electron diffraction. The 2 nm-thick film on the former showed bcc- and CaF2-type (TiH1.5) reflections while that on the latter showed TiH1.5ones immediately after the evaporation. Judging from the lattice parameter (0.33 nm), the bcc crystallite was analyzed to be β-Ti. This is the first observation of β-Ti grown in evaporated Ti films. The β-Ti changed into TiH1.5with time. This spontaneous hydrogenation mechanism of the evaporated Ti films is discussed.
Original language | English |
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Pages (from-to) | L1904-L1906 |
Journal | Japanese Journal of Applied Physics |
Volume | 29 |
Issue number | 10 |
DOIs | |
Publication status | Published - 1990 Oct |
Keywords
- Evaporated Ti films
- Growth mechanism
- Hydrogenation
- NaCI substrates
- RHEED
- TiH
- β-Ti