Spontaneous hydrogenation of ti films evaporated on nacl substrates ii

Yoshitaka Kasukabe, Yukio Yamada

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17 Citations (Scopus)


The growth and structure of Ti films evaporated on ultra-high-vacuum- and air-cleaved NaCl substrates at room temperature have been studied by reflection high-energy electron diffraction. The 2 nm-thick film on the former showed bcc- and CaF2-type (TiH1.5) reflections while that on the latter showed TiH1.5ones immediately after the evaporation. Judging from the lattice parameter (0.33 nm), the bcc crystallite was analyzed to be β-Ti. This is the first observation of β-Ti grown in evaporated Ti films. The β-Ti changed into TiH1.5with time. This spontaneous hydrogenation mechanism of the evaporated Ti films is discussed.

Original languageEnglish
Pages (from-to)L1904-L1906
JournalJapanese Journal of Applied Physics
Issue number10
Publication statusPublished - 1990 Oct


  • Evaporated Ti films
  • Growth mechanism
  • Hydrogenation
  • NaCI substrates
  • TiH
  • β-Ti


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