Spontaneous hydrogenation of ti films evaporated on nacl substrates i

Yukio Yamada, Yoshitaka Kasukabe, Shinji Nagata, Sadae Yamaguchi

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20 Citations (Scopus)


The depth profiles of hydrogen concentration in Ti-evaporated films on NaCl substrates have been measured with the elastic recoil detection analysis technique using a 2.7 MeV 4He+beam. It has been revealed that the Ti film absorbs hydrogen escaped from the substrate. The hydrogen concentration in the film decreased with increasing substrate temperature. It is pointed out that the epitaxial growth of substances with a great affinity for hydrogen, evaporated on NaCl or deliquescent alkali halide substrates, should be re-examined from the point of view of hydrogenation on the substrate.

Original languageEnglish
Pages (from-to)L1888-L1891
JournalJapanese Journal of Applied Physics
Issue number10
Publication statusPublished - 1990 Oct


  • Depth profiles of hydrogen
  • Elastic recoil detection analysis
  • Evolution of hydrogen
  • NaCI substrate
  • Ti-evaporated films
  • TiH


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