Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy

Kentaro Iwami; Takahito Ono; Masayoshi Esashi

doi:10.1117/12.807260

Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy

Kentaro Iwami, Takahito Ono, Masayoshi Esashi

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×10⁴ Ω.cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.

Original language	English
Article number	713315
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7133
DOIs	https://doi.org/10.1117/12.807260
Publication status	Published - 2009
Event	5th International Symposium on Instrumentation Science and Technology - Shenyang, China Duration: 2009 Sept 15 → 2009 Sept 18

Keywords

Microelectromechanical systems (MEMS)
Scanning near-field optical microscopy
Terahertz
Terahertz time-domain spectroscopy
Zinc oxide

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10.1117/12.807260

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title = "Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy",

abstract = "In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×104 Ω.cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.",

keywords = "Microelectromechanical systems (MEMS), Scanning near-field optical microscopy, Terahertz, Terahertz time-domain spectroscopy, Zinc oxide",

author = "Kentaro Iwami and Takahito Ono and Masayoshi Esashi",

year = "2009",

doi = "10.1117/12.807260",

language = "English",

volume = "7133",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "5th International Symposium on Instrumentation Science and Technology ; Conference date: 15-09-2009 Through 18-09-2009",

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TY - JOUR

T1 - Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy

AU - Iwami, Kentaro

AU - Ono, Takahito

AU - Esashi, Masayoshi

PY - 2009

Y1 - 2009

N2 - In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×104 Ω.cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.

AB - In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×104 Ω.cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.

KW - Microelectromechanical systems (MEMS)

KW - Scanning near-field optical microscopy

KW - Terahertz

KW - Terahertz time-domain spectroscopy

KW - Zinc oxide

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U2 - 10.1117/12.807260

DO - 10.1117/12.807260

M3 - Conference article

AN - SCOPUS:62549098632

SN - 0277-786X

VL - 7133

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 713315

T2 - 5th International Symposium on Instrumentation Science and Technology

Y2 - 15 September 2009 through 18 September 2009

ER -

Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy

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Keywords

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