Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy

Kentaro Iwami, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review


In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×104 Ω.cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.

Original languageEnglish
Article number713315
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2009
Event5th International Symposium on Instrumentation Science and Technology - Shenyang, China
Duration: 2009 Sept 152009 Sept 18


  • Microelectromechanical systems (MEMS)
  • Scanning near-field optical microscopy
  • Terahertz
  • Terahertz time-domain spectroscopy
  • Zinc oxide


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