Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy

Kentaro Iwami; Takahit O. Ono; Masayoshi Esashi

doi:10.1541/ieejsmas.127.508

Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy

Kentaro Iwami, Takahit O. Ono, Masayoshi Esashi

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6 × 10 ⁴Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.

Original language	English
Pages (from-to)	508-509
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	127
Issue number	11
DOIs	https://doi.org/10.1541/ieejsmas.127.508
Publication status	Published - 2007

Keywords

MEMS
Photoconductive antenna
Terahertz (THz)
THz-TDS
Zinc oxide

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10.1541/ieejsmas.127.508

Cite this

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title = "Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy",

abstract = "In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6 × 10 4Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.",

keywords = "MEMS, Photoconductive antenna, Terahertz (THz), THz-TDS, Zinc oxide",

author = "Kentaro Iwami and Ono, {Takahit O.} and Masayoshi Esashi",

year = "2007",

doi = "10.1541/ieejsmas.127.508",

language = "English",

volume = "127",

pages = "508--509",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

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TY - JOUR

T1 - Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy

AU - Iwami, Kentaro

AU - Ono, Takahit O.

AU - Esashi, Masayoshi

PY - 2007

Y1 - 2007

N2 - In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6 × 10 4Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.

AB - In this paper, we report on the design, fabrication and characterization of a zinc oxide (ZnO) photoconductive antenna as a sub-terahertz (THz) pulse emitter or detector for time-domain spectroscopy (TDS). A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 9.6 × 10 4Ω·cm. The fabricated ZnO photoconductive antennas are evaluated using a TDS measurement system. Photoconductivity of ZnO is obtained using a Ti:Sapphire femto second laser with a wavelength of 775 nm. The bandwidth of the ZnO photoconductive antenna is evaluated to be 1 THz.

KW - MEMS

KW - Photoconductive antenna

KW - Terahertz (THz)

KW - THz-TDS

KW - Zinc oxide

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JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 11

ER -

Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy

Abstract

Keywords

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