Sputtered-sliced fabrication of kinoform zone plate for hard X-ray focusing

M. Yasumoto, S. Tamura, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, H. Takano

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We are planning to develop a kinoform zone plate (ZP) for hard X-ray using a sputtered-sliced (SS) method with two materials (Cu/Al). The SS kinoform ZP is composed of a Cu/AJ multilayer that is based on radial modulation of the refractive indices of deposition materials. The X-ray through the zones interferes constructively at the focal point. The kinoform ZP, therefore, has an advantage of high focusing efficiency. According to the our theoretical calculation, the focusing efficiency of the Cu/Al kinoform PZP is up to 86% in the 0-30 keV X-ray energy region, while one of the conventional Cu/Al multilayer Fresnel zone plate is up to 38%.

Original languageEnglish
Pages (from-to)189-192
Number of pages4
JournalJournal De Physique. IV : JP
Publication statusPublished - 2003 Mar
Externally publishedYes
Event7th International Conference on X-Ray Microscopy - Grenoble, France
Duration: 2002 Jul 282002 Aug 2

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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