Sputtering Target for Information Network Devices —Present and Future—

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3 Citations (Scopus)

Original language	English
Pages (from-to)	22-27
Number of pages	6
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	50
Issue number	1
DOIs	https://doi.org/10.3131/jvsj.50.22
Publication status	Published - 2007 Jan

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title = "Sputtering Target for Information Network Devices —Present and Future—",

author = "Migaku Takahashi and Shin Saito and Masakiyo Tsunoda",

year = "2007",

month = jan,

doi = "10.3131/jvsj.50.22",

language = "English",

volume = "50",

pages = "22--27",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

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number = "1",

}

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AU - Saito, Shin

AU - Tsunoda, Masakiyo

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