SrTiO3 Thin films with visible-light band gap fabricated by nitrogen reactive sputtering

Je Deok Kim, Toshiyuki Mori, Itaru Honma

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Strontium titanate (SrTiO3; STP) films with extremely high nitrogen concentration, grown by an rf reactive magnetron sputtering system, were investigated by spectroscopic ellipsometry, X-ray diffraction, and X-ray photoemission spectroscopy measurements. A significant shift of the absorption edge to a visible-light region was observed, and surprisingly, the bandgap of nitrogen-doped STP containing up to 9.5 at. % of nitrogen shifted from 3.5 eV of pure STP to 1.9 eV. The result indicates the successful substitutional doping of nitrogen into the STP lattice, demonstrating the feasibility of band-gap narrowing through nitrogen reactive sputtering.

Original languageEnglish
Pages (from-to)L468-L470
JournalJapanese Journal of Applied Physics
Volume46
Issue number17-19
DOIs
Publication statusPublished - 2007 May 11

Keywords

  • Nitrogen-doped STO
  • Reactive magnetron sputtering
  • Thin film
  • Visible-light bandgap

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