Abstract
This paper presents some state-of-the-art laser-based systems developed for precision mechanical measurements, especially for dimensional measurement. After a brief discussion on basic characteristics of laser, which form the fundaments of laser metrology, a number of optical sensors and measurement systems employing laser diode as the light source for precision measurement of length, position, angle and surface profile are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 493-500 |
| Number of pages | 8 |
| Journal | Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao |
| Volume | 27 |
| Issue number | 5 |
| Publication status | Published - 2006 Oct |
Keywords
- Angle surface profile
- Displacement
- Error motion
- Instrumentation
- Laser diode
- Precision measurement