This paper presents some state-of-the-art laser-based systems developed for precision mechanical measurements, especially for dimensional measurement. After a brief discussion on basic characteristics of laser, which form the fundaments of laser metrology, a number of optical sensors and measurement systems employing laser diode as the light source for precision measurement of length, position, angle and surface profile are presented.
|Number of pages||8|
|Journal||Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao|
|Publication status||Published - 2006 Oct|
- Angle surface profile
- Error motion
- Laser diode
- Precision measurement