Statistical analysis of step meandering on Si(113) miscut along a low symmetry azimuth

Koichi Sudoh, Tatsuo Yoshinobu, Hiroshi Iwasaki

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2 Citations (Scopus)


We have investigated the structure of double steps on Si(113) surfaces miscut along a low symmetry azimuth, using scanning tunneling microscopy (STM). To estimate the kink excitation energies, distributions of kink lengths and kink-kink separation distances have been measured from the STM images with atomic resolution. We compare the results with predictions calculated using terrace-step-kink models. The results show that the energy cost of the kink of double unit length is more than two times that of one unit length. We discuss the relevance of this result to the observed step shapes.

Original languageEnglish
Pages (from-to)128-133
Number of pages6
JournalSurface Science
Issue number2-3
Publication statusPublished - 1999 Jan 4


  • Equilibrium thermodynamics and statistical mechanics
  • Scanning tunneling microscopy
  • Silicon
  • Surface roughening
  • Surface structure, morphology, roughness, and topography
  • Vicinal single crystal surfaces


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