TY - JOUR
T1 - Stress sensor performance of sputtered Fe-Si-B alloy thin coating under tensile and bending loads
AU - Kurita, Hiroki
AU - Diguet, Gildas
AU - Froemel, Joerg
AU - Narita, Fumio
N1 - Funding Information:
We would like to thank Kei Makabe for his experiments. This research was supported by Grant-in-Aid for Scientific Research (A), 19H00733 from the Japan Society for the Promotion of Science (JSPS), and Tohoku University Frontier Research in Duo Program .
Publisher Copyright:
© 2022 Elsevier B.V.
PY - 2022/8/16
Y1 - 2022/8/16
N2 - This study evaluated the stress sensing performance of a thin coating of Fe-Si-B alloy. Particularly, a sputtered Fe-Si-B alloy thin coating with a thickness of 1500 nm on a polyimide substrate and a sputtered Fe-Si-B alloy thin coating with a thickness of 500 nm on a silicon wafer substrate were prepared for tensile and bending tests, respectively. The inductance of the Fe-Si-B alloy thin coating significantly decreased with slight changes in both tensile and bending stresses. Furthermore, the external magnetic field effectively improved the sensitivity of the target load region. Consequently, Fe-Si-B alloy thin coating can be applied as micro force sensors.
AB - This study evaluated the stress sensing performance of a thin coating of Fe-Si-B alloy. Particularly, a sputtered Fe-Si-B alloy thin coating with a thickness of 1500 nm on a polyimide substrate and a sputtered Fe-Si-B alloy thin coating with a thickness of 500 nm on a silicon wafer substrate were prepared for tensile and bending tests, respectively. The inductance of the Fe-Si-B alloy thin coating significantly decreased with slight changes in both tensile and bending stresses. Furthermore, the external magnetic field effectively improved the sensitivity of the target load region. Consequently, Fe-Si-B alloy thin coating can be applied as micro force sensors.
KW - Force sensors
KW - Inductance
KW - Inverse magnetostrictive effect
KW - Magnetic thin films
KW - Sputtering
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U2 - 10.1016/j.sna.2022.113652
DO - 10.1016/j.sna.2022.113652
M3 - Article
AN - SCOPUS:85131401416
SN - 0924-4247
VL - 343
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 113652
ER -