Structural, optical and electrical properties of DC sputtered indium saving indium-tin oxide (ITO) thin films

Material Science

• Indium 100%
• Thin Films 25%
• Liquid Films 16%
• Crystallization 8%
• Argon 8%
• Sputtered Film 8%
• Protective Atmosphere 8%
• Air 8%
• Amorphous Material 8%

Chemistry

• Oxide 25%
• Dioxygen 16%
• Liquid Film 16%
• Reaction Temperature 16%
• Electrical Property 8%
• Glass Substrate 8%
• Crystallization 8%
• Optical Property 8%
• Heat Treatment 8%
• Amorphous Structure 8%
• Amorphous Material 8%
• Spectra 8%
• Amount 8%
• Resistivity 8%
• Heat 8%
• Sputtering 8%

Engineering

• Indium-Tin-Oxide 33%
• Thin Films 25%
• Direct Current 25%
• Temperature 16%
• Glass Substrate 8%
• Heat Treatment 8%
• Deposited Film 8%
• Gas Flowrate 8%
• Optimum Condition 8%
• Smooth Surface 8%
• Electrical Measurement 8%