Structure and high-frequency soft-magnetic properties of Co-TiN nano-composite films

Yiwen Zhang, Hanae Kijima, Nobukiyo Kobayashi, Shigehiro Ohnuma, Hiroshi Masumoto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3GHz. The films have high magnetic loss absorption (Ploss/Pin) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices.

Original languageEnglish
Pages (from-to)36-39
Number of pages4
JournalJournal of the Ceramic Society of Japan
Issue number1409
Publication statusPublished - 2013 Jan


  • High frequency permeability
  • Nano-composite films
  • Noise suppressor
  • Soft magnetic property

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry


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