TY - JOUR
T1 - Structure and magnetic properties of Fe-Ti-N films deposited by DC magnetron facing target sputtering
AU - Peng, D. L.
AU - Sumiyama, K.
AU - Oku, M.
AU - Li, D. X.
AU - Suzuki, K.
PY - 1996/9
Y1 - 1996/9
N2 - Using a facing target sputtering equipment, Fe-Ti-N films were deposited on water-cooled and heated substrates under different nitrogen flow ratios, A(N2). The composition, microstructure, and Magnetic properties of the films were investigated by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and a vibrating sample magnetometer (VSM). The films consist of α-Fe, TiNx, and Fe4N, where the volume fraction of these phases varies with A(N2) and the substrate temperature during sputtering. The α-Fe(Ti) films with supersaturated nitrogen exhibit a larger Ms than the Fe-Ti films. However, Hs. first decreases and then increases with increasing R(N2). This is ascribed to a distortion of the α-Fe lattice due to doping of Ti atoms and the compressive stress caused by the incorporation of sufficient nitrogen atoms.
AB - Using a facing target sputtering equipment, Fe-Ti-N films were deposited on water-cooled and heated substrates under different nitrogen flow ratios, A(N2). The composition, microstructure, and Magnetic properties of the films were investigated by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and a vibrating sample magnetometer (VSM). The films consist of α-Fe, TiNx, and Fe4N, where the volume fraction of these phases varies with A(N2) and the substrate temperature during sputtering. The α-Fe(Ti) films with supersaturated nitrogen exhibit a larger Ms than the Fe-Ti films. However, Hs. first decreases and then increases with increasing R(N2). This is ascribed to a distortion of the α-Fe lattice due to doping of Ti atoms and the compressive stress caused by the incorporation of sufficient nitrogen atoms.
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U2 - 10.1002/pssa.2211570118
DO - 10.1002/pssa.2211570118
M3 - Article
AN - SCOPUS:0030234777
SN - 0031-8965
VL - 157
SP - 139
EP - 152
JO - Physica Status Solidi (A) Applied Research
JF - Physica Status Solidi (A) Applied Research
IS - 1
ER -