Suitable passivation thickness on a metal line to prevent electromigration damage

Engineering

• Electromigration 100%
• Passivation 50%
• Thickness 50%
• Surfaces 20%
• Threshold Current Density 10%
• Experiments 10%
• Measurer 10%
• High Density 10%

Chemistry

• Chemical Passivation 50%
• Thickness 50%
• Resistance 20%
• Surface 20%
• Saturation 20%
• Metal 10%
• Concentration 10%
• Flow 10%

Material Science

• Surface 20%
• Carrier Concentration 10%