Original language | English |
---|---|
Pages (from-to) | 439-445 |
Number of pages | 7 |
Journal | Shinku/Journal of the Vacuum Society of Japan |
Volume | 47 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2004 Jan |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering