Surface-Acoustic-wave-driven directional atomizers integrated with pico-liter micropumps

Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


In this paper, a surface-Acoustic-wave (SAW)-driven atomizer with micropumps was developed. The micropumps consisted of an epoxy-based reservoir with an exhaust slot and a pair of interdigital transducers (IDTs). The liquid supply from the reservoir was controlled by SAW bursts from the IDTs. A microsurge tank was fabricated into the exhaust slot to stabilize the atomization. The transferred liquid was atomized by a pair of arc-shaped IDTs (AS-IDTs). The AS-IDT was optimally designed using optical vibration observations to focus the SAW energy into a single point and enabled high directional atomization. In the operational test of the micropump with water, a transfer rate of 0.24 pl per single burst was confirmed, where the burst signal is operated at 24.1 MHz with a 50% duty cycle, 40-ms period, and 70 Vp-p amplitude. In the water atomization test, we succeeded in ejecting a narrow mist spray from the substrate using a burst signal operating at 23.8 MHz with a 20% duty cycle, 1-ms period, and 50 Vp-p amplitude. The width of the ejected mist spray was 0.7 mm in the vicinity of the substrate, and was maintained at > 1 mm within the ejection height of 8 mm.

Original languageEnglish
Article number6884790
Pages (from-to)696-702
Number of pages7
JournalJournal of Microelectromechanical Systems
Issue number3
Publication statusPublished - 2015 Jun 1


  • SAW
  • arc-shaped IDT
  • atomizer
  • fluidic device.
  • micro pump

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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