TY - JOUR
T1 - Surface characterization of a diamond turned XY sinusoidal grating
AU - Shimizu, Y.
AU - Osawa, S.
AU - Meguro, T.
AU - Lu, W.
AU - Gao, W.
PY - 2011
Y1 - 2011
N2 - Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.
AB - Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process.
KW - Accuracy
KW - Metrology
KW - Sinusoidal grating
KW - Topography
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U2 - 10.1016/j.proeng.2011.11.122
DO - 10.1016/j.proeng.2011.11.122
M3 - Conference article
AN - SCOPUS:83755183206
SN - 1877-7058
VL - 19
SP - 337
EP - 342
JO - Procedia Engineering
JF - Procedia Engineering
T2 - 1st CIRP Conference on Surface Integrity, CSI 2012
Y2 - 30 January 2012 through 1 February 2012
ER -