Surface profile measurement of internal micro-structures

Bin Xu, Yuki Shimizu, So Ito, Wei Gao

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


A measurement system is presented for surface profile measurements of micro-structures generated on internal cylindrical surfaces of workpieces. The main components of the measurement system are an air-bearing spindle to rotate the measured internal microstructures, an air-bearing displacement sensor with a diamond micro-stylus probe to scan the surface profile of the internal microstructures being measured and a vibration isolation table to reduce the disturbance of the measurement environment. The stability of the air-bearing displacement sensor with a diamond micro-stylus probe was experimentally investigated. Measurements of surface profile of internal micro-structures were also carried out while employing a newly-developed algorithm to correct errors caused by the tip radius of the diamond micro-stylus.

Original languageEnglish
Pages (from-to)1535-1541
Number of pages7
JournalInternational Journal of Precision Engineering and Manufacturing
Issue number9
Publication statusPublished - 2013 Sept


  • Air-bearing displacement sensor
  • Air-bearing spindle
  • Internal micro-structures
  • Stylus tip radius correction
  • Surface profile measurement


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