TY - JOUR
T1 - Surface profile measurement of internal micro-structures
AU - Xu, Bin
AU - Shimizu, Yuki
AU - Ito, So
AU - Gao, Wei
PY - 2013/9
Y1 - 2013/9
N2 - A measurement system is presented for surface profile measurements of micro-structures generated on internal cylindrical surfaces of workpieces. The main components of the measurement system are an air-bearing spindle to rotate the measured internal microstructures, an air-bearing displacement sensor with a diamond micro-stylus probe to scan the surface profile of the internal microstructures being measured and a vibration isolation table to reduce the disturbance of the measurement environment. The stability of the air-bearing displacement sensor with a diamond micro-stylus probe was experimentally investigated. Measurements of surface profile of internal micro-structures were also carried out while employing a newly-developed algorithm to correct errors caused by the tip radius of the diamond micro-stylus.
AB - A measurement system is presented for surface profile measurements of micro-structures generated on internal cylindrical surfaces of workpieces. The main components of the measurement system are an air-bearing spindle to rotate the measured internal microstructures, an air-bearing displacement sensor with a diamond micro-stylus probe to scan the surface profile of the internal microstructures being measured and a vibration isolation table to reduce the disturbance of the measurement environment. The stability of the air-bearing displacement sensor with a diamond micro-stylus probe was experimentally investigated. Measurements of surface profile of internal micro-structures were also carried out while employing a newly-developed algorithm to correct errors caused by the tip radius of the diamond micro-stylus.
KW - Air-bearing displacement sensor
KW - Air-bearing spindle
KW - Internal micro-structures
KW - Stylus tip radius correction
KW - Surface profile measurement
UR - http://www.scopus.com/inward/record.url?scp=84892853245&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84892853245&partnerID=8YFLogxK
U2 - 10.1007/s12541-013-0207-7
DO - 10.1007/s12541-013-0207-7
M3 - Article
AN - SCOPUS:84892853245
SN - 2234-7593
VL - 14
SP - 1535
EP - 1541
JO - International Journal of Precision Engineering and Manufacturing
JF - International Journal of Precision Engineering and Manufacturing
IS - 9
ER -