Three kinds of SrTiO3(001) surfaces, Ti02terminated, SrO terminated, and a mixture of these surfaces, are selectively formed and their surface structures are examined by means of reflection high energy electron diffraction, x-ray photoelectron spectroscopy, and x-ray photoelectron diffraction. The Ti02terminated surface is obtained under a moderate temperature (<700 K) cleaning by the Bi deposition/desorption method and subsequent oxidation, where the distance between the first Ti02plane and the SrO plane underneath is 1.95+0.07 A and the oxygen of the first Ti02plane is pulled out 0.10 A. The SrO terminated surface is obtained by growing one monolayer of SrO on the Ti02terminated surface, where the distance between the first SrO plane and Ti02plane underneath is 1.95+0.10 A and the oxygen of the first SrO plane is pulled out 0.16 A. These two surfaces are different from the surface obtained by Ar+sputtering and annealing, which is found to be the mixture of Ti02and SrO terminated surfaces.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - 1993 Sept