TY - JOUR
T1 - Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition
AU - An, Zhonglie
AU - Toda, Masaya
AU - Ono, Takahito
PY - 2014
Y1 - 2014
N2 - We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.
AB - We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.
KW - Carbon nanotubes-Cu composite
KW - Supercritical fluid deposition
KW - Thermal interface resistance
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U2 - 10.1541/ieejsmas.134.38
DO - 10.1541/ieejsmas.134.38
M3 - Article
AN - SCOPUS:84893266316
SN - 1341-8939
VL - 134
SP - 38
EP - 39
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
IS - 2
ER -