Systematic fabrication of (Ba,Sr)TiO3 microdots with different compositions was examined by ink-jet printing from two precursor solutions for BaTiO3 and SrTiO3, and subsequent heat treatment at 700°C. The microdots were prepared by 40-times-overlapped discharging of the precursor solutions, and the composition of each microdot was adjusted by changing the shot number ratios of the two solutions. Relatively flat microdots with a width of approximately 100 μm and a thickness of approximately 1 m were formed by depositing self-assembled monolayer films on the substrate surface before discharge. Finally, 41 types of (Ba,Sr)TiO3 microdots with different compositions were successfully fabricated simultaneously on a Pt/Ti/SiO2/Si substrate, and the microdots were confirmed by Raman spectroscopy to have structures corresponding to the Ba/Sr ratios.
- Ink-jet printing
- Self-assembled monolayer (SAM)