We present electrical transport and optical properties of Ta-doped TiO 2 epitaxial thin films with varying Ta concentration grown by the pulsed laser deposition method. The Ti0.95Ta0.05O 2 film exhibited a resistivity of 2.5 × 10-4 Ωcm at room temperature, and an internal transmittance of 95% in the visible light region. These values are comparable to those of a widely used transparent conducting oxide (TCO), indium tin oxide. Furthermore, this new material falls into a new category of TCOs that utilizes d electrons.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Publication status||Published - 2005 Aug 26|
- Pulsed laser deposition
- Thin film
- Transparent conducting oxide
ASJC Scopus subject areas
- Physics and Astronomy(all)