@inproceedings{5206fec640bf48ccbdacd080d3d84ca6,
title = "Tactile sensor network system with CMOS-MEMS integration for social robot applications",
author = "Masanori Muroyama and Mitsutoshi Makihata and Shuji Tanaka and Takahiro Kojima and Takahiro Nakayama and Ui Yamaguchi and Hitoshi Yamada and Yutaka Nonomura and Hirofumi Funabashi and Yoshiyuki Hata and Masayoshi Esashi",
note = "Funding Information: This study was performed in R&D Center of Excellence for Integrated Microsystems, Tohoku University under the program “Formation of Innovation Center for Fusion of Advanced Technologies” supported by Special Coordination Funds for Promoting Science and Technology.; Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014 ; Conference date: 26-03-2014 Through 27-03-2014",
year = "2014",
language = "English",
series = "Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014",
publisher = "Apprimus Verlag",
pages = "181--188",
editor = "Thomas Gessner",
booktitle = "Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014",
}