Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)491-497
Number of pages7
JournalJournal of the Japan Society for Precision Engineering
Volume76
Issue number5
DOIs
Publication statusPublished - 2010 May

Keywords

  • Commercialization
  • Design
  • Mems
  • Micro-mirrors
  • Micro-sensors
  • Micromachining
  • Products

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