TEM microstructure analysis for compressively stressed Pb(Zr,Ti)O 3 thin films by CSD-derived LaNiO3 bottom electrodes

Kotaro Ozawa; Masaaki Ishizuka; Naonori Sakamoto; Tomoya Ohno; Takanori Kiguchi; Takeshi Matsuda; Toyohiko Konno; Naoki Wakiya; Hisao Suzuki

doi:10.1142/S1793604712600168

TEM microstructure analysis for compressively stressed Pb(Zr,Ti)O ₃ thin films by CSD-derived LaNiO₃ bottom electrodes

Kotaro Ozawa, Masaaki Ishizuka, Naonori Sakamoto, Tomoya Ohno, Takanori Kiguchi, Takeshi Matsuda, Toyohiko Konno, Naoki Wakiya, Hisao Suzuki

IMR - Institute for Materials Research (institute affiliation only)

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Pb(Zr,Ti)O₃ (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr_0.53Ti_0.47O₃. We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO₃ (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/Si films effectively influenced the ferroelectric properties.

Original language	English
Article number	1260016
Journal	Functional Materials Letters
Volume	5
Issue number	2
DOIs	https://doi.org/10.1142/S1793604712600168
Publication status	Published - 2012 Jun

Keywords

CSD
PZT
stress
TEM
thin film

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10.1142/S1793604712600168

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title = "TEM microstructure analysis for compressively stressed Pb(Zr,Ti)O 3 thin films by CSD-derived LaNiO3 bottom electrodes",

abstract = "Pb(Zr,Ti)O3 (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr0.53Ti0.47O3. We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO3 (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/Si films effectively influenced the ferroelectric properties.",

keywords = "CSD, PZT, stress, TEM, thin film",

author = "Kotaro Ozawa and Masaaki Ishizuka and Naonori Sakamoto and Tomoya Ohno and Takanori Kiguchi and Takeshi Matsuda and Toyohiko Konno and Naoki Wakiya and Hisao Suzuki",

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T1 - TEM microstructure analysis for compressively stressed Pb(Zr,Ti)O 3 thin films by CSD-derived LaNiO3 bottom electrodes

AU - Ozawa, Kotaro

AU - Ishizuka, Masaaki

AU - Sakamoto, Naonori

AU - Ohno, Tomoya

AU - Kiguchi, Takanori

AU - Matsuda, Takeshi

AU - Konno, Toyohiko

AU - Wakiya, Naoki

AU - Suzuki, Hisao

PY - 2012/6

Y1 - 2012/6

N2 - Pb(Zr,Ti)O3 (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr0.53Ti0.47O3. We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO3 (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/Si films effectively influenced the ferroelectric properties.

AB - Pb(Zr,Ti)O3 (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr0.53Ti0.47O3. We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO3 (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/Si films effectively influenced the ferroelectric properties.

KW - CSD

KW - PZT

KW - stress

KW - TEM

KW - thin film

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ER -

TEM microstructure analysis for compressively stressed Pb(Zr,Ti)O ₃ thin films by CSD-derived LaNiO₃ bottom electrodes

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Keywords

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