Pb(Zr,Ti)O3 (PZT) possesses superior ferroelectric and piezoelectric properties arisen near a morphotropic phase boundary (MPB) composition, PbZr0.53Ti0.47O3. We have prepared a PZT (MPB composition) thin film and perovskite-type LaNiO3 (LNO) electrodes on Si substrate by chemical solution deposition (CSD) method. The CSD-derived LNO bottom electrode applied compressive stress to the PZT film and enhanced the ferroelectric properties of the PZT film. TEM and SAED revealed that stress distribution and microstructures of the PZT/LNO/Si films effectively influenced the ferroelectric properties.
- thin film