TY - GEN
T1 - Temperature Sensor Using Two Thermoelectric Liquid Electrolytes in Microfluidic Channels
AU - Inomata, Naoki
AU - Van Toan, Nguyen
AU - Ono, Takahito
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - A temperature sensor using two thermoelectric liquid electrolytes in microfluidic channels is proposed, and fabricated, and evaluated. Two different electrolytes, which Seebeck coefficients are positive and negative, are electrically connected via a metal electrode. The electrode was deposited on the backside of a heat stage, which means the electrical contact area of the two electrolytes are heated as the stage is heated. The sum of the thermoelectric voltage from the two electrolytes is observed changing the temperature of the heat stage. The sensitivity of the conventional metal thermocouples depends on the Seebeck coefficients of the composed materials; however, the absolute values of the solid materials are not so large (less than few-hundreds V/K or so). Some liquid electrolytes show the relatively large absolute value of the Seebeck coefficient; however, the liquid cannot keep their interface at the contact area because of the mixing and diffusing. A temperature sensor based on a liquid thermocouple is proposed, and the proto-type is fabricated. Moreover, the performances of the thermoelectric voltage response and temperature resolution are evaluated. As a result, the thermoelectric voltage of 10.6 mV/K and the resolution of 12.8 mK are obtained. The thermoelectric voltage is reasonable considering the Seebeck coefficient of the used electrolytes.
AB - A temperature sensor using two thermoelectric liquid electrolytes in microfluidic channels is proposed, and fabricated, and evaluated. Two different electrolytes, which Seebeck coefficients are positive and negative, are electrically connected via a metal electrode. The electrode was deposited on the backside of a heat stage, which means the electrical contact area of the two electrolytes are heated as the stage is heated. The sum of the thermoelectric voltage from the two electrolytes is observed changing the temperature of the heat stage. The sensitivity of the conventional metal thermocouples depends on the Seebeck coefficients of the composed materials; however, the absolute values of the solid materials are not so large (less than few-hundreds V/K or so). Some liquid electrolytes show the relatively large absolute value of the Seebeck coefficient; however, the liquid cannot keep their interface at the contact area because of the mixing and diffusing. A temperature sensor based on a liquid thermocouple is proposed, and the proto-type is fabricated. Moreover, the performances of the thermoelectric voltage response and temperature resolution are evaluated. As a result, the thermoelectric voltage of 10.6 mV/K and the resolution of 12.8 mK are obtained. The thermoelectric voltage is reasonable considering the Seebeck coefficient of the used electrolytes.
KW - MEMS
KW - Microchannel
KW - Temperature sensor
KW - Thermocouple
KW - Thermoelectric electrolyte
UR - http://www.scopus.com/inward/record.url?scp=85071903819&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071903819&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808737
DO - 10.1109/TRANSDUCERS.2019.8808737
M3 - Conference contribution
AN - SCOPUS:85071903819
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 2166
EP - 2169
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -