The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer

S. Yoshimura; D. D. Djayaprawira; Y. Takakuwa; M. Takahashi

doi:10.1109/INTMAG.2003.1230579

The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer

S. Yoshimura, D. D. Djayaprawira, Y. Takakuwa, M. Takahashi

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, the effect of naturally adsorbed gas on the substrate surface on the growth of very thin WCr seedlayer has been examined using an in-situ Auger electron spectroscopy method.

Original language	English
Title of host publication	Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	0780376471, 9780780376472
DOIs	https://doi.org/10.1109/INTMAG.2003.1230579
Publication status	Published - 2003
Event	2003 IEEE International Magnetics Conference, Intermag 2003 - Boston, United States Duration: 2003 Mar 30 → 2003 Apr 3

Publication series

Name	Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference

Conference

Conference	2003 IEEE International Magnetics Conference, Intermag 2003
Country/Territory	United States
City	Boston
Period	03/3/30 → 03/4/3

Keywords

Chromium
Computational Intelligence Society
Grain size
Impurities
Magnetic films
Magnetic materials
Magnetic properties
Pain
Soft magnetic materials
Substrates

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10.1109/INTMAG.2003.1230579

Cite this

Yoshimura, S., Djayaprawira, D. D., Takakuwa, Y., & Takahashi, M. (2003). The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer. In Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference Article 1230579 (Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2003.1230579

Yoshimura, S. ; Djayaprawira, D. D. ; Takakuwa, Y. et al. / The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer. Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc., 2003. (Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference).

@inproceedings{69f193b5671a41a48696dd1195a5ed0a,

title = "The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer",

abstract = "In this paper, the effect of naturally adsorbed gas on the substrate surface on the growth of very thin WCr seedlayer has been examined using an in-situ Auger electron spectroscopy method.",

keywords = "Chromium, Computational Intelligence Society, Grain size, Impurities, Magnetic films, Magnetic materials, Magnetic properties, Pain, Soft magnetic materials, Substrates",

author = "S. Yoshimura and Djayaprawira, {D. D.} and Y. Takakuwa and M. Takahashi",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE International Magnetics Conference, Intermag 2003 ; Conference date: 30-03-2003 Through 03-04-2003",

year = "2003",

doi = "10.1109/INTMAG.2003.1230579",

language = "English",

series = "Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference",

address = "United States",

}

Yoshimura, S, Djayaprawira, DD, Takakuwa, Y & Takahashi, M 2003, The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer. in Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference., 1230579, Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference, Institute of Electrical and Electronics Engineers Inc., 2003 IEEE International Magnetics Conference, Intermag 2003, Boston, United States, 03/3/30. https://doi.org/10.1109/INTMAG.2003.1230579

The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer. / Yoshimura, S.; Djayaprawira, D. D.; Takakuwa, Y. et al.
Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc., 2003. 1230579 (Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer

AU - Yoshimura, S.

AU - Djayaprawira, D. D.

AU - Takakuwa, Y.

AU - Takahashi, M.

PY - 2003

Y1 - 2003

N2 - In this paper, the effect of naturally adsorbed gas on the substrate surface on the growth of very thin WCr seedlayer has been examined using an in-situ Auger electron spectroscopy method.

AB - In this paper, the effect of naturally adsorbed gas on the substrate surface on the growth of very thin WCr seedlayer has been examined using an in-situ Auger electron spectroscopy method.

KW - Chromium

KW - Computational Intelligence Society

KW - Grain size

KW - Impurities

KW - Magnetic films

KW - Magnetic materials

KW - Magnetic properties

KW - Pain

KW - Soft magnetic materials

KW - Substrates

UR - http://www.scopus.com/inward/record.url?scp=84949504102&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84949504102&partnerID=8YFLogxK

U2 - 10.1109/INTMAG.2003.1230579

DO - 10.1109/INTMAG.2003.1230579

M3 - Conference contribution

AN - SCOPUS:84949504102

T3 - Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference

BT - Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2003 IEEE International Magnetics Conference, Intermag 2003

Y2 - 30 March 2003 through 3 April 2003

ER -

Yoshimura S, Djayaprawira DD, Takakuwa Y, Takahashi M. The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer. In Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2003. 1230579. (Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference). doi: 10.1109/INTMAG.2003.1230579

The effect of naturally adsorbed gas on the substrate surface on the growth of island-like WCR seedlayer

Abstract

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Keywords

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