The performance of the IMR three-dimensional atom probe

K. Hono, R. Okano, T. Saeda, T. Sakurai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

This paper reports the design and the performance of a three-dimensional atom probe which was recently constructed at the Institute for Materials Research, Tohoku University. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom probe (PoSAP). These are controlled with a CAMAC based controlling system interfaced with a Macintosh computer. The performance of the reflectron type atom probe and the position sensitive atom probe is demonstrated.

Original languageEnglish
Pages (from-to)453-459
Number of pages7
JournalApplied Surface Science
Volume87-88
Issue numberC
DOIs
Publication statusPublished - 1995 Mar 2
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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