Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response

Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the established chromatic confocal probe. Theoretical analysis and numerical simulation are carried out for computing the measurement range of the chromatic confocal probe.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages362-364
Number of pages3
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2018 Jul 2
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country/TerritoryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Chromatic confocal microscopy
  • Femtosecond laser
  • Measurement range
  • Side lobe

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