Thermopile sensor-devices for the catalytic detection of hydrogen gas

Lionel Fabrice Houlet; Woosuck Shin; Kazuki Tajima; Maiko Nishibori; Noriya Izu; Toshio Itoh; Ichiro Matsubara

doi:10.1016/j.snb.2007.07.119

Thermopile sensor-devices for the catalytic detection of hydrogen gas

Lionel Fabrice Houlet, Woosuck Shin, Kazuki Tajima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

SRIS - SR Core Research Division

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si_0.8Ge_0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device.

Original language	English
Pages (from-to)	200-206
Number of pages	7
Journal	Sensors and Actuators B: Chemical
Volume	130
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2007.07.119
Publication status	Published - 2008 Mar 14

Keywords

Catalyst
Hydrogen
Micro-sensor
SiGe
Thermoelectric
Thermopile

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10.1016/j.snb.2007.07.119

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title = "Thermopile sensor-devices for the catalytic detection of hydrogen gas",

abstract = "We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si0.8Ge0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device.",

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AU - Houlet, Lionel Fabrice

AU - Shin, Woosuck

AU - Tajima, Kazuki

AU - Nishibori, Maiko

AU - Izu, Noriya

AU - Itoh, Toshio

AU - Matsubara, Ichiro

PY - 2008/3/14

Y1 - 2008/3/14

N2 - We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si0.8Ge0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device.

AB - We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si0.8Ge0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device.

KW - Catalyst

KW - Hydrogen

KW - Micro-sensor

KW - SiGe

KW - Thermoelectric

KW - Thermopile

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Thermopile sensor-devices for the catalytic detection of hydrogen gas

Abstract

Keywords

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