Thickness-dependent surface proton conduction in (111) oriented yttria-stabilized zirconia thin film

Makoto Takayanagi, Takashi Tsuchiya, Kinya Kawamura, Makoto Minohara, Koji Horiba, Hiroshi Kumigashira, Tohru Higuchi

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)


Polycrystalline Zr0.92Y0.08O2 (YSZ) thin films were prepared by RF magnetron sputtering. 80- and 160-nm thin films exhibited (111) orientation and a polycrystalline structure, respectively. The 80-nm thin film had larger distortion than the 160-nm thin film. While the 80-nm thin film and a 120-nm thin film exhibited proton conduction, the 160-nm thin film did not, indicating that surface proton conduction can depend on film thickness. The activation energy of the 80- and 120-nm thin films measured in a wet atmosphere (0.52 eV) was about half of that measured in a dry atmosphere. The enhancement of conductivity for the thin films may be attributed to distortion, which may change the structure around an oxygen vacancy at the YSZ grain surface, accompanied by possible enhancement of H2O adsorption. H2O-annealed thin film had a hydrogen-induced level in the band gap energy region. This is the first observation of hydrogen-induced level at the surface state of the YSZ thin film obtained by X-ray absorption spectroscopy.

Original languageEnglish
Pages (from-to)46-51
Number of pages6
JournalSolid State Ionics
Publication statusPublished - 2017 Nov 15


  • Oxygen vacancy
  • Proton conduction
  • Yttria-stabilized zirconia


Dive into the research topics of 'Thickness-dependent surface proton conduction in (111) oriented yttria-stabilized zirconia thin film'. Together they form a unique fingerprint.

Cite this