TY - JOUR
T1 - Thickness effect on magnetic properties of nanocrystalline CoFeBN soft magnetic thin films
AU - Jeon, H. J.
AU - Kim, I.
AU - Kim, J.
AU - Kim, K. H.
AU - Yamaguchi, M.
PY - 2004/5
Y1 - 2004/5
N2 - The thickness dependence of magnetic properties was examined in nanocrystalline CoFeBN films fabricated by a RF magnetron sputtering method. It was revealed that the coercivity of the films abruptly increased at a critical thickness without any noticeable microstructural difference. In addition, high B, N contents decreased the critical thickness. These behaviors were discussed in connection with residual film stress.
AB - The thickness dependence of magnetic properties was examined in nanocrystalline CoFeBN films fabricated by a RF magnetron sputtering method. It was revealed that the coercivity of the films abruptly increased at a critical thickness without any noticeable microstructural difference. In addition, high B, N contents decreased the critical thickness. These behaviors were discussed in connection with residual film stress.
KW - Anisotropy
KW - Soft magnetic thin film
KW - Thickness effect
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U2 - 10.1016/j.jmmm.2003.11.153
DO - 10.1016/j.jmmm.2003.11.153
M3 - Article
AN - SCOPUS:23044499140
SN - 0304-8853
VL - 272-276
SP - 382
EP - 384
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
IS - I
ER -