The thickness dependence of magnetic properties was examined in nanocrystalline CoFeBN films fabricated by a RF magnetron sputtering method. It was revealed that the coercivity of the films abruptly increased at a critical thickness without any noticeable microstructural difference. In addition, high B, N contents decreased the critical thickness. These behaviors were discussed in connection with residual film stress.
- Soft magnetic thin film
- Thickness effect