Thin-film shielded loop coil for RF magnetic field sensing

H. Yurugi, S. Yabukami, M. Yamaguchi, K. I. Arai, N. Masuda, N. Tamaki, H. Tohya

Research output: Contribution to journalConference articlepeer-review


A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.

Original languageEnglish
Pages (from-to)GF-11
JournalDigests of the Intermag Conference
Publication statusPublished - 1999
EventProceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea
Duration: 1999 May 181999 May 21


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