Thin-film shielded loop coil for RF magnetic field sensing

H. Yurugi; S. Yabukami; M. Yamaguchi; K. I. Arai; N. Masuda; N. Tamaki; H. Tohya

Thin-film shielded loop coil for RF magnetic field sensing

H. Yurugi, S. Yabukami, M. Yamaguchi, K. I. Arai, N. Masuda, N. Tamaki, H. Tohya

Tohoku University

Research output: Contribution to journal › Conference article › peer-review

Abstract

A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.

Original language	English
Pages (from-to)	GF-11
Journal	Digests of the Intermag Conference
Publication status	Published - 1999
Event	Proceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea Duration: 1999 May 18 → 1999 May 21

Cite this

@article{ef956463adc94c1388dd51e387d58fc5,

title = "Thin-film shielded loop coil for RF magnetic field sensing",

abstract = "A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.",

author = "H. Yurugi and S. Yabukami and M. Yamaguchi and Arai, {K. I.} and N. Masuda and N. Tamaki and H. Tohya",

year = "1999",

language = "English",

pages = "GF--11",

journal = "Digests of the Intermag Conference",

issn = "0074-6843",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' ; Conference date: 18-05-1999 Through 21-05-1999",

}

TY - JOUR

T1 - Thin-film shielded loop coil for RF magnetic field sensing

AU - Yurugi, H.

AU - Yabukami, S.

AU - Yamaguchi, M.

AU - Arai, K. I.

AU - Masuda, N.

AU - Tamaki, N.

AU - Tohya, H.

PY - 1999

Y1 - 1999

N2 - A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.

AB - A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.

UR - http://www.scopus.com/inward/record.url?scp=0033299332&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033299332&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033299332

SN - 0074-6843

SP - GF-11

JO - Digests of the Intermag Conference

JF - Digests of the Intermag Conference

T2 - Proceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99'

Y2 - 18 May 1999 through 21 May 1999

ER -

Thin-film shielded loop coil for RF magnetic field sensing

Abstract

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