Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

Tasuku Shimizu, Takahiro Nakamura, Shunichi Sato

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

Original languageEnglish
Title of host publicationROMOPTO 2006
Subtitle of host publicationEighth Conference on Optics
DOIs
Publication statusPublished - 2007
EventROMOPTO 2006: Eighth Conference on Optics - Sibiu, Romania
Duration: 2006 Sept 42006 Sept 7

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6785
ISSN (Print)0277-786X

Conference

ConferenceROMOPTO 2006: Eighth Conference on Optics
Country/TerritoryRomania
CitySibiu
Period06/9/406/9/7

Keywords

  • Boron nitride
  • Femtosecond laser
  • Pulsed laser deposition
  • Thin film
  • Wurtzite structure

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