Thin palladium membrane microreactors with oxidized porous silicon support and their application

Shu Ying Ye, Shuji Tanaka, Masayoshi Esashi, Satoshi Hamakawa, Takaaki Hanaoka, Fujio Mizukami

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15 Citations (Scopus)


We microfabricated a MEMS (micro electro mechanical system)-based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen and helium at temperatures ranging from 200 °C to 250 °C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250 °C and a partial pressure difference of 212 kPa. H2/N2 and H2/He selectivity was about 44 and 10 at 250 °C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS ring. We also carried out the hydrogenation of 1-butene at 250 °C using the developed microreactor. The conversion of 1-butene of 100% was obtained at low flow rate of 1-butene. The results show that microreactors have a potential to be used in hydrogen purification and hydrogenation.

Original languageEnglish
Pages (from-to)2011-2018
Number of pages8
JournalJournal of Micromechanics and Microengineering
Issue number11
Publication statusPublished - 2005 Nov 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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