In this study, we demonstrated the three-dimensional (3D) imaging by magnetic resonance force microscopy (MRFM) based on electron spin resonance (ESR) measurements at room temperature. For a microsample containing radicals, the 3D force distribution was obtained using a custom-made Si nanowire and a permanent magnetic particle. Calculation using precise values of the magnetic field distribution is required to define an accurate response function for the 3D deconvolution processing of the spin density distribution. A symmetric resonance magnetic field produces good periodic force maps using a spherical micromagnet, which simplifies the deconvolution processing with resonant slice systems. In addition, the 3D imaging method was processed in the wavenumber space by a Fourier transform that used a simple convolution with noise parameters in the response function. After the reconstruction of the distribution of electron spins (radicals), the shape of the sample agreed with that of the optical image; thus, the accuracy of the internal density structure was verified. We believe that the combination of a Si nanowire and a spherical magnetic particle used for magnetic resonance detection is a good candidate for Fourier transform 3D deconvolution in multiple MRFM applications.
- 3D imaging
- Electron spin resonance
- Magnetic resonance force microscopy