Three-dimensional observation of nanoscale ferroelectric domains using scanning nonlinear dielectric microscopy with electric field correction by Kelvin probe force microscopy

An advanced technique for the measurement of three-dimensional ferroelectric domain structure is described. Scanning nonlinear dielectric microscopy is used to measure the polarization components both perpendicular and parallel to the specimen surface. A nanoscale electric field correction is devised and performed using Kelvin probe force microscopy to allow more precise measurement of the nanoscale polarization component parallel to the specimen surface. Using this electric field correction, three-dimensional imaging of the ferroelectric polarization orientation is demonstrated.