TY - JOUR
T1 - Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator
AU - Sasaki, Minoru
AU - Briand, Danick
AU - Noell, Wilfried
AU - De Rooij, Nicolaas F.
AU - Hane, Kazuhiro
N1 - Funding Information:
Manuscript received October 19, 2003; revised April 4, 2004. This work was supported by the Venture Business Laboratory, Tohoku University. M. Sasaki and K. Hane are with the Department of Nanomechanics Engineering, Tohoku University, Sendai 980-8579, Japan (e-mail: sasaki@hane.mech.tohoku.ac.jp). D. Briand, W. Noell, and N. F. de Rooij are with the Institute of Microtechnology, University of Neuchatel, CH-2007 Neuchatel, Switzerland. Digital Object Identifier 10.1109/JSTQE.2004.830616
PY - 2004/5
Y1 - 2004/5
N2 - A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.
AB - A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.
KW - Buckling
KW - Silicon-on-insulator microelectromechanical systems (SOI-MEMS)
KW - Three-dimensional (3-D) structure
KW - Vertical comb drive actuator
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U2 - 10.1109/JSTQE.2004.830616
DO - 10.1109/JSTQE.2004.830616
M3 - Article
AN - SCOPUS:4344592985
SN - 1077-260X
VL - 10
SP - 455
EP - 461
JO - IEEE Journal of Selected Topics in Quantum Electronics
JF - IEEE Journal of Selected Topics in Quantum Electronics
IS - 3
ER -