Time response of a microelectromechanical silicon photonic waveguide coupler switch

Syotaro Abe, Manh Hoang Chu, Takashi Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Time response of a silicon photonic nanowire-waveguide microelectromechanical switch is studied by measuring optical output and analyzing mechanical and electrical dynamics. The switching mechanism is based on the gap variation of a directional waveguide coupler consisting of 400-nm-wide and 260-nm-thick waveguides. One of the coupler waveguides is moved by an ultrasmall comb actuator. A theoretical model is proposed by combining the mechanical motion and the electrical circuit response of the switch. By analyzing the model, an optimum condition for switching rise time is obtained to be ~10 μs, where the mechanical oscillation is suppressed by the driving electrical circuit with a large resistance. The rise time measured from the optical output intensity was 18μs.

Original languageEnglish
Article number6826497
Pages (from-to)1553-1556
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number15
Publication statusPublished - 2014 Aug 1


  • optical switch
  • Silicon waveguide
  • switching time
  • waveguide coupler


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