A Mo single-layer film with a stepwise thickness distribution was fabricated on the same Mo/Si reflection multilayer film. Total electron-yield X-ray standing-wave (TEY-XSW) spectra of the aperiodic multilayer were measured with reflection spectra. The peak positions of the standing waves in the TEY-XSW spectra changed as the film thickness of the top Mo-layer increased.
|Number of pages||3|
|Journal||Journal of Electron Spectroscopy and Related Phenomena|
|Publication status||Published - 2005 Jun|
- Standing wave
- Total electron yield