Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant

Masaya Toda, Chunyang Li, Nguyen Van Toan, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


In this study, a Pd–Si–Cu metallic glass was applied to a torsional resonator with long torsion beams. It is challenging to obtain the excellent mechanical performances of metallic glass when applied to torsional resonators with a low spring constant. The resonant frequency is evaluated using a laser Doppler vibrometer, and a fundamental resonant frequency of 1438 Hz and a torsional resonant frequency of 1908 Hz are obtained. When the resonant frequency is compared to the simulation results using the finite element method, a tensile stress of 25 MPa is expected for the beam part combining the residual stress and deformation. The rotational spring constant is 8.8 × 104 pNm/rad, and the displacement of the stage per unit torque is estimated to be 5.7 pm/fNm. We propose a torsional resonator with metallic glass without residual stress and initial deformation for the detection of small torques such as quantum spins.

Original languageEnglish
Pages (from-to)929-935
Number of pages7
JournalMicrosystem Technologies
Issue number3
Publication statusPublished - 2021 Mar


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