Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films

Tetsuya Oshino; Daisuke Shindo; Makoto Hirabayashi; Eiji Aoyagi; Hideo Nikaido

doi:10.1143/JJAP.28.1909

Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films

Tetsuya Oshino, Daisuke Shindo, Makoto Hirabayashi, Eiji Aoyagi, Hideo Nikaido

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900ºC, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W₂C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.

Original language	English
Pages (from-to)	1909-1914
Number of pages	6
Journal	Japanese journal of applied physics
Volume	28
Issue number	10 R
DOIs	https://doi.org/10.1143/JJAP.28.1909
Publication status	Published - 1989 Oct
Externally published	Yes

Keywords

Annealing effect
Transmission electron microscopy
W/C multilayer film
W2C
X-ray reflectivity

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.28.1909

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title = "Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films",

abstract = "Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900ºC, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W2C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.",

keywords = "Annealing effect, Transmission electron microscopy, W/C multilayer film, W2C, X-ray reflectivity",

author = "Tetsuya Oshino and Daisuke Shindo and Makoto Hirabayashi and Eiji Aoyagi and Hideo Nikaido",

year = "1989",

month = oct,

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volume = "28",

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number = "10 R",

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T1 - Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films

AU - Oshino, Tetsuya

AU - Shindo, Daisuke

AU - Hirabayashi, Makoto

AU - Aoyagi, Eiji

AU - Nikaido, Hideo

PY - 1989/10

Y1 - 1989/10

N2 - Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900ºC, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W2C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.

AB - Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900ºC, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W2C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.

KW - Annealing effect

KW - Transmission electron microscopy

KW - W/C multilayer film

KW - W2C

KW - X-ray reflectivity

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 10 R

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Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films

Abstract

Keywords

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